Thermo Scientific Helios DualBeam (plasma electron microscope with plasma focused ion beam) has four different types of ions in the primary beam.
This makes it possible to select the ion that gives the best result for the sample which is analyzed and used as a sample preparation for CEM or TEM, as well as 3D characterization of materials.
It is easy to switch working with argon to nitrogen, oxygen and xenon within 10 minutes without compromising the analysis.
More of the systems work with xenon plasma. Helios DualBeam is applicable in new materials and semiconductors investigations.